Phase Transformation on HZO Ferroelectric Layer in Ferroelectric Random-Access Memory Induced by X-Ray Irradiation
SEMICONDUCTOR SCIENCE AND TECHNOLOGY（2024）
关键词
HZO,ferroelectric random-access memory (FeRAM),non-volatile memory,x-ray,radiation
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要