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Prediction of the Evolution of Defects Induced by the Heated Implantation Process: Contribution of Kinetic Monte Carlo in a Multi-Scale Modeling Framework

P. L. Julliard,A. Johnsson,N. Zographos,R. Demoulin,R. Monflier,A. Jay, O. Er-Riyahi,F. Monsieur,S. Joblot,F. Deprat,D. Rideau,P. Pichler,A. Hemeryck,F. Cristiano

SOLID-STATE ELECTRONICS（2023）

Cited 0|Views29
Key words
Kinetic Monte Carlo,Process simulations,Heated implantation,Multi-scale modeling
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