Analysis of Dislocation Contrast in Grazing Incidence Synchrotron Monochromatic Beam X-ray Topographs of 4H-Sic Wafers in 22 4̅ 16 Reflection
Journal of Electronic Materials（2025）
Key words
Synchrotron monochromatic beam x-ray topography,ray tracing simulations,defects,4H-SiC
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