Unfolding the Curves: Novel Designs and Metrology Methods for Curvilinear Masks Qualification

Darko Trivkovic, Xuelong Shi, Yi-Pei Tsai, Chieh-Miao Chang, Jiahui Wang, Victoria Malacara,Balakumar Baskaran,,Youssef Drissi,Joost Bekaert,Kenichi Miyaguchi

Photomask Technology 2024（2024）

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