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Memory Window and Variability Modeling of Multi- Domain Al:HfO2Ferroelectric NAND Memory

Kuan–Hung Liu,Tue Gunst, Ko–Hsin Lee,Anders Blom,Xi–Wei Lin

2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)(2024)

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关键词
Ferroelectric,HfO2,Al composition,Fe-NAND,Density functional theory,TCAD simulation
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