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Modeling of Negative Bias Temperature Instability (NBTI) for Gate-All-Around (GAA) Stacked Nanosheet Technology

Leitao Liu, Jingtian Fang,Ashish Pal,Plamen Asenov,Mohit Bajaj, Bei Deng,Xi-Wei Lin,Souvik Mahapatra,Subi Kengeri,El Mehdi Bazizi

2024 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, IRPS 2024（2024）

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关键词
Negative Bias Temperature Instability,Gate-all-around,Nanosheet,RD,RDD,SiGe
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