Simulation Study on the Robustness of Polar Mark for Incident Light Polarization States
2023 International Workshop on Advanced Patterning Solutions (IWAPS)（2023）
Key words
polar mark,polarization,segmented alignment mark,rigorous coupled wave analysis,wet recess process
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined