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Papers共 16 篇Author StatisticsCo-AuthorSimilar Experts

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Progress in Inverse Lithography Technology
Futian Wang,Juan Wei, Cuixiang Wang,Jiang Miao, Yu Mu, Chunlong Yu, Ruihua Liu, Fu Li, Jingjing Fan, Jinlai Liu, Jingkang Qin, Enqiang Tian,Song Sun, Chong Wang, Xiaonan Liu, Hao Yang,Di Liang,Binbin Yan,Liang Li,Qingchen Cao,Jiangliu Shi
LASER & OPTOELECTRONICS PROGRESSno. 21 (2024)
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逆向光刻工艺进展
Wang Futian,Wei Juan, Wang Cuixiang,Jiang Miao, Mu Yu, Yu Chunlong, Liu Ruihua, Li Fu, Fan Jingjing, Liu Jinlai, Qin Jingkang, Tian Enqiang,Sun Song, Wang Chong, Liu Xiaonan, Yang Hao,Liang Di,Yan Binbin, Li Liang,Cao Qingchen,Shi Jiangliu
Laser &amp Optoelectronics Progressno. 21 (2024)
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Optimization of Lithography Performance at Different Manhattan Levels of ILT and Electron Beam Shot Size
Cuixiang Wang, Yu Mu, Futian Wang,Juan Wei, Ruihua Liu, Enqiang Tian,Di Liang,Yufei Sha, Yaokun Li, Hao Yang,Song Sun,Miao Jiang,Qingchen Cao,Jiangliu Shi
Photomask Technology 2024 (2024)
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Contour-based Mask Quantization Methodology for Curvilinear ILT Mask and on Wafer Performance Analysis
Futian Wang, Xiaonan Liu,Juan Wei,Miao Jiang, Cuixiang Wang, Yu Mu, Enqiang Tian, Yaokun Li,Song Sun, Ruihua Liu, Jiahao Xi,Yufei Sha,Di Liang, Hao Yang,Qingchen Cao,Jiangliu Shi
Photomask Technology 2024 (2024)
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Rigorous Simulation for Impact of Self-Aligned Multiple Patterning on Alignment
Mingyi Yao,Yuejing Qi,Guangying Zhou,Liang Li,Miao Jiang, Elly Shi
2023 International Workshop on Advanced Patterning Solutions (IWAPS)pp.1-3, (2023)
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Simulation Study on the Robustness of Polar Mark for Incident Light Polarization States
Guangying Zhou,Yuejing Qi,Mingyi Yao,Liang Li,Miao Jiang,Jiangliu Shi
2023 International Workshop on Advanced Patterning Solutions (IWAPS)pp.1-3, (2023)
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对准标记鲁棒性分析方法及仿真
周光迎,齐月静, 李亮,姜淼,师江柳, 么铭怡
Acta Optica Sinicano. 11 (2023)
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Line Edge Roughness Analysis and Simulation at Advanced Litho Process
Yufei Sha, Jiahao Xi,Liang Li,Miao Jiang,Di Liang, Ran Zhang, Ganlin Song, Enqiang Tian, Xiuyan Cheng, Futian Wang, Cuixiang Wang,Guangying Zhou,Mingyi Yao,Jiangliu Shi
2023 International Workshop on Advanced Patterning Solutions (IWAPS)pp.1-3, (2023)
Cited1Views0EIWOSBibtex
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Author Statistics

#Papers: 16

#Citation: 16

H-Index: 1

G-Index: 3

Sociability: 4

Diversity: 1

Activity: 1

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