In-fab Assessment of Heat Budget in 3D NAND Flash Devices Using Terahertz Wave-Based Metrology System
2023 48TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES, IRMMW-THZ（2023）
关键词
3D NAND flash memory devices,3D NAND structures,electrical property variations,fab assessment,heat budget,heat-related semiconductor fabrication processes,hydrogen concentration changes,hydrogen concentrations,in-fab terahertz wave-based metrology system,in-fab THz-based measurement tools,nondestructive method,semiconductor fabrication processes
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要