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Papers共 33 篇Author StatisticsCo-AuthorSimilar Experts

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Thin Film Analysis Using Self-Referenced Terahertz Transient Signal for Semiconductor Manufacturing Applications
Inkeun Baek,Sunhong Jun,Yoonkyung Jang, Martin Priwisch,Suhwan Park, Eun Hyuk Choi,Wontae Kim,SungYoon Ryu,Taejoong Kim,Myungjun Lee,Yusin Yang
2024 49TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES, IRMMW-THZ 2024 (2024)
Cited0Views0EIWOSBibtex
0
0
In-fab Assessment of Heat Budget in 3D NAND Flash Devices Using Terahertz Wave-Based Metrology System
Inkeun Baek,SungYoon Ryu, Ikseon Jeon,Yoonkyung Jang,Suhwan Park, Eun Hyuk Choi,Wontae Kim, Martin Priwisch,Taejoong Kim,Myungjun Lee,Yusin Yang
2023 48TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES, IRMMW-THZ (2023)
Cited1Views0EIWOSBibtex
1
0
A Study on Defect Signal Improvement Using Multi-Scan Optic Patch Images and New Detection Algorithm
Sungyoon Ryu, Seunghyeok Son,Chan-Gi Jeon, Sujin Lee, Minho Rim,Yusin Yang,Younghoon Sohn
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVII (2023)
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Author Statistics

#Papers: 32

#Citation: 339

H-Index: 12

G-Index: 18

Sociability: 4

Diversity: 1

Activity: 1

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