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Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation

Jingqian Xi,Lei Xu, Yuan Wang,Huafeng Liu,Xingyin Xiong,Xudong Zou,Chengxin Li,Fangjing Hu, Chen Wang,Michael Kraft,Chun Zhao

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS（2023）

Cited 8|Views4
Key words
Index Ternis- Multiple parameter decoupling,blue-sideband excitation,resonant MEMS sensors,cross-sensitivity suppression
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