An In-Situ Tester for Extracting Piezoresistive Coefficients.Fengyang Li,Runze Yu,Dacheng ZhangMicromachines(2023)引用 0|浏览4关键词MEMS,parameters extraction,effective stiffness,piezoresistive coefficientAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要