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First Demonstration of Full Integration and Characterization of 4F² 1S1M Cells with 45 Nm of Pitch and 20 Nm of MTJ Size

Soo Man Seo,Hisanori Aikawa,Soo Gil Kim,Toshihiko Nagase, Yuich Ito,Tae Jung Ha, Kenichi Yoshino, Bo Kyung Jung, Tadaaki Oikawa,Ku Youl Jung, Hyun In Moon, Bum Su Kim,Fumiyoshi Matsuoka,Kosuke Hatsuda,Katsuhiko Hoya,Seiyon Kim,Sung-Hoon Lee,Myung-Hee Na,Seon Yong Cha

2022 International Electron Devices Meeting (IEDM)（2022）

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