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Predicting the Effects of Plasma-Induced Damage on P–n Junction Leakage and Its Application in the Characterization of Defect Distribution

Yoshihiro Sato,Satoshi Shibata,Kazuko Nishimura,Masayuki Yamasaki,Masashi Murakami,Keiichiro Urabe,Koji Eriguchi

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena（2022）

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