Yield Learning for Complex FinFET Defect Mechanisms Based on Volume Scan Diagnosis Results
2019 30TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC)（2019）
Key words
scan diagnosis,volume diagnosis,yield analysis,root cause identification,cell aware diagnosis
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined