P3O-5 High Frequency and High Temperature SAW Devices Based on Nanocrystalline Diamond Film on Langasite Substrate

M. El Hakiki,O. Elmazria,F. Benedic,P. Nicolay,R. Azouani,D. Moneger

Vancouver, BC（2006）

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关键词

Rayleigh waves,diamond,nanostructured materials,piezoelectric devices,surface acoustic wave devices,LaGaSi,Rayleigh mode,diamond film thickness,electromechanical coupling SAW devices,film cracking,film delamination,grain size,high temperature SAW devices,langasite substrate,nanocrystalline diamond film deposition,phase velocity,satisfactory purity,surface roughness

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