Ultraprecision and Highly Uniform Nanoscale Conformality Enabled by Introducing Oxide Buffer Layer for One-Dimensional Grating Standard

Ya-Xin Zhang,Song Wang,Chen-Ying Wang, Yi-Fan Zhao,Feng Han, Di Liu, Peng-Cheng Zhang,Nan Zhu, Kun Zheng,Wei Ren,Wei-Xuan Jing, Zhuang-De Jiang

Rare Metals（2025）

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Nanoscale conformality,Calibration,One-dimensional grating standard,Al2O3 conformality

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