Density Functional Theory Study on Mechanism for Oxygen Diffusion in Silicon with Hydrogen

Chai Zongyue, Tang Lin, Liu Zhu, Qi Dianyu, Jiang Huiyun, Wang Chunya, Gao Dawei,Wu Hanming, Fang Wenzhang

2025 Conference of Science and Technology of Integrated Circuits (CSTIC)（2025）

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关键词

wet oxidation,oxygen migration,ab initio molecular dynamics,metadynamics,nudged elastic band

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