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A Design Stucture of Three Axis MEMS Accelerometer with Low Cross-Axis Sensitivity

Qing Xie, Zhongshan Xu,GuoDong Zhao, Rongzheng Ding, Yage Zhao,Xiaona Zhu,Shaofeng Yu

2025 Conference of Science and Technology of Integrated Circuits (CSTIC)（2025）

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关键词
MEMS,Three-axis accelerometers,Cross-axis sensitivity,FEM
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