300Mm IIIV on SOI Laser Integration Process, Fabrication and Prototyping

Benoit Charbonnier, Amélie Bellemin-Comte, Laetitia Adelmini, Vincent Mathieu, Mathieu Stigliani, Clément Castan, Pierre-Emile Philip, Damien Hebras,Jean-Michel Hartmann,Karen Ribaud,Bertrand Szelag,Karim Hassan

2025 IEEE Silicon Photonics Conference (SiPhotonics)（2025）

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Key words

Silicon Photonics,Hybrid Integration,IIIV lasers

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