Analysis and Fabrication of a Diaphragm with Silicon Substrate for Controllable Pre-Tensioned Stress
2024 Academic Conference of China Instrument and Control Society (ACCIS)（2024）
Key words
MEMS,acoustic sensor,resonant frequency,diaphragm
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined