An Ultra-High Linearity MOMES Accelerometer Based on a Self-Traceable Grating Interferometer

Zhikun Chang, Song, Pengfei Niu, Guangxu Xiao, Zichao Lin, Chunling He,Xiao Deng,Dongbai Xue, Yuying Xie,Xinbin Cheng,Tongbao Li

IEEE Sensors Journal（2025）

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Key words

MOEMS accelerometer,self-traceable grating,grating interferometer,traceability,linearity

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