Solidly Mounted Longitudinally Excited A1 Mode Resonator Based on Linbo3/Metal/SIO2/SIC

Xiaoli Fang,Jinbo Wu, Shibin Zhang,Pengcheng Zheng, Xinjian Ke, Juxing He, Mijing Sun,Xin Ou

2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS)（2025）

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Key words

Solidly mounted resonator (SMR),longitudinally excited,A1 mode,high-velocity support substrate (HS),bottom electrode,5G NR filter

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