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Nanometer-resolution 4-Probe Laser Interferometric Displacement Sensor Performance Evaluation: Principles and Operations

Qi Sang,Yumei Wen,Jianwu He, Shaoliang Gong,Ping Li,Yixin Ma

IEEE Transactions on Instrumentation and Measurement（2025）

Cited 0|Views6
Key words
Laser interferometric displacement sensor,micro-thruster,multi-probe,performance evaluation
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