Precise Wavelength Control in Fabry-Perot Filters Using Thin Etch Stop Layers
2024 IEEE 26th Electronics Packaging Technology Conference (EPTC)（2024）
Key words
Precise Control,Fabry-Perot Interferometer,Etch Stop Layer,Precise Wavelength,Refractive Index,Optical Filter,Quartz Substrate,Wavelength Selection,Etching Step,Fabrication Process,Fabric Thickness,Vertical Profiles,Etching Process,High Refractive Index,Wet Etching,Filter Response,Dry Etching,Refractive Index Of Material,Selective Etching,Transparent Oxide,Dielectric Mirror,Application Of Hyperspectral Imaging,Optical Monitoring
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