A MEMS Resonator Coupled with a Resistive Sensor for Improved Sensing and Actuation
Journal of Microelectromechanical Systems（2025）
Key words
Buckling limit,MEMS resonators,pull-in instability,readout processes,resistive sensors,sensitivity,tunable switches
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined