Silicon Resistivity Impact on Surface Waves for Antenna On-Chip Applications

L. Delait, Z. Tian,M. Rack, S. Ma,Q. Courte,A. Rennings,C. Craeye,J.–P. Raskin,D. Lederer

2024 IEEE Asia-Pacific Microwave Conference (APMC)（2024）

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Surface waves,substrate resistivity,trap-rich Si-based substrate,parasitic surface conduction (PSC),dipole-slot antenna,on-chip antenna,CPW line,grounded slab

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