Enhanced Silicon Crystallization on Dielectric Materials at Reduced Temperature
IEEE Transactions on Semiconductor Manufacturing（2025）
Key words
Crystalline area fraction,Front-End-of-Line (FEOL),Heterojunction Bipolar Transistor (HBT),Low temperature polysilicon (LTPS),Microcrystalline silicon
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined