Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications

Yu Chieh Peng, Yu Jie Wang, Kuan-Heng Chen, Yu Hung Lin,Haruyuki Sakurai, Hsueh-Chih Chang, Cheng-Ching Chiang, Ruei-Tzu Duh, Bo-Ray Lee,Chia-Yen Huang,Min-Hsiung Shih,Ray-Hua Horng,Kuniaki Konishi,Ming Lun Tseng

NANO LETTERS（2025）

Cited 0|Views3

Key words

metasurface,metalens,deep ultraviolet light,laser direct writing,DUV imaging

AI Read Science

Must-Reading Tree

Example

Generate MRT to find the research sequence of this paper

Chat Paper

Summary is being generated by the instructions you defined