Study of Vth Degradation Mechanism in FeFET with TiN/Al2O3/HfO2/Al2O3/Hf0.5Zr0.5O2/SiOx/Si Structure
2024 IEEE 17th International Conference on Solid-State & Integrated Circuit Technology (ICSICT)（2024）
关键词
FeFET,charge trapping/de-trapping,gate leakage,trap
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