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Study on the Effect of Process Parameters and Removal Behavior of Single-Crystal SiC Polishing Based on a Photocatalytic Fixed Polishing Plate

Chen Lin, Jilong Xie,Jiabin Lu,Qiusheng Yan

DIAMOND AND RELATED MATERIALS（2025）

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Key words
UV photocatalytic,Fixed polishing plate,Single-crystal SiC,Process parameters,Polishing effect
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