Cyclic Scheduling of Multi-Type Wafers Concurrent Processing in Single-Arm Cluster Tools with Residency Time Constraints
EXPERT SYSTEMS WITH APPLICATIONS（2025）
Key words
Single-arm cluster tools,Multiple wafer types,Cyclic scheduling,Residency time constraints,Mixed integer linear programming
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined