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Preliminary Study of Α-Ta Multilayer Alternating Coating: Through Bias Control

Xiaoyun Ding,Menghui Cui,Jinchao Jiao,Yong Lian,Jinghan Yang, Yawen Wu, Yingchun Cheng,Jin Zhang,Xiubo Tian,Chunzhi Gong

SURFACE & COATINGS TECHNOLOGY（2025）

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关键词
alpha-Ta,AEGD,DCMS plus HiPIMS,bias control,Multilayer alternating coating
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