Memory State Dynamics in BEOL FeFETs: Impact of Area Ratio on Analog Write Mechanisms and Charging

Hannes Dahlberg, Oscar Kaatranen,Karl-Magnus Persson,Arto Rantala,Jacek Flak, Lars-Erik Wernersson

IEEE ACCESS（2025）

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Key words

BEOL integration,CMOS,FeFET,ferroelectricity,HZO,non-volatile memory,switching dynamics,BEOL integration,CMOS,FeFET,ferroelectricity,HZO,non-volatile memory,switching dynamics

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