A Metal Film Thickness Measurement System with a Large Range Based on High-Performance ME Sensors
IEEE-ASME TRANSACTIONS ON MECHATRONICS（2025）
关键词
Metals,Thickness measurement,Sensors,Magnetic sensors,Coils,Frequency measurement,Eddy currents,Semiconductor device measurement,Voltage measurement,Magnetoelectric effects,Eddy-current,magnetoelectric (ME) sensors,measurement range,metal thickness measurement,noncontact measurement
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