Research on Calibration Technology for Ultralow Vacuum Leak Rate Based on Different Tracer Gases

Zhao Lan, Dong Meng,Cheng Yongjun, Sun Wenjun, Chen Lian, Feng Tianyou, Wang Xinghui, Zhang Ruifang,Guan Baoguo,Ma Yafang

Measurement Sensors（2025）

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Key words

Ultralow vacuum leak rate,Calibration method,Different tracer gases

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