Accelerating Nanocrystalline-Diamond Nucleation in the Low-Temperature MW-CVD Growth of Diamond-Like Carbon Films Via Reacting-Gas Pre-Heating
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS（2025）
关键词
Diamond-like carbon (DLC),Nanocrystalline diamond (NCD),Microwave plasma CVD synthesis,Low-temperature growth,Pre-heating of the source gases,Raman spectroscopy,Electron microscopy
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