Efficient Nonlinear Resist Modeling by Combining and Cascading Quadratic Wiener Systems

Chunxiao Mu, Lei Cheng, Song Zhang,Hao Jiang, David H. Wei, Yanlong Sun,Jinlong Zhu,Shiyuan Liu

OPTICS AND LASER TECHNOLOGY（2025）

引用 0|浏览4

关键词

OPC,Computational lithography,Nonlinear resist system modeling,Performance optimization,Model calibration method

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要