A 5 Μm Pitch VGA Resolution GeSi Lock-in Pixel Array in Backside Illumination Configuration

C.-Y. Chen, Y.-J. Lin, Y.-C. Lu, Y.-H. Liu, T.-T. Wu,C.-C. Lin, C.-L. Chen,C.-F. Liang,S.-L. Chen,N. Na

2024 IEEE Photonics Conference (IPC)（2024）

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Key words

GeSi,lock-in pixel,iTOF,SWIR,3D imager

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