High‐Yield Production of High‐κ/Metal Gate Nanopattern Array for 2D Devices Via Oxidation‐Assisted Etching Approach (small 51/2024) Weida Hong, Jiejun Zhang,Daobing Zeng,Chen Wang,Zhongying Xue,Miao Zhang,Ziao Tian,Zengfeng DiSmall（2024）引用 0|浏览1AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
