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Research on the Modulation Aberration Numerical Correction Method of Interference Signals for High Aspect Ratio Samples Utilizing Coherence Scanning Interferometry.

Wenyou Qiao,Zhishan Gao,Dan Zhu,Lu Chen,Zhenyan Guo,Jianqiu Ma, Xiao Huo,Xiaoxin Fan, Jiale Zhang, Yin Li,Qun Yuan

Optics express（2025）

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