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Modeling the Influence of Deposition Parameters on the Crystalline Degree in the Simulation of Polycrystalline Silicon

Mikael Santonen,Antti Lahti, Divya Srivastava,Zahra Jahanshah Rad,Mikko Miettinen,Masoud Ebrahimzadeh, Johanna Laaksonen,Pekka Laukkanen,Marko Punkkinen,Kalevi Kokko,Antti Kuronen, Katja Parkkinen, Markus Eklund

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS（2024）

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Key words
crystal growth,crystallinity,deposition models,deposition of thin films,grain boundaries,molecular dynamics simulations,polycrystalline silicon
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