Numerical Simulation of Vibration-Enhanced Liquid Precursor Filling in Porous Nanostructures
2024 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)（2024）
Key words
liquid precursors,nano-filling,three-dimensional vibrations,numerical simulation
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined