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Phase Evolution and Sintering Behavior of High-Performance IGTO Sputtering Targets

Yongge Zhao,Wenyu Zhang,Xiaokai Liu,Hetao Zhao,Huiyu Zhang, Xina Liang, Yuanpei Yang,Jianhang Zhang,Benshuang Sun, Yang Liu,Xiaochao Wu,Jilin He

CERAMICS INTERNATIONAL（2025）

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Key words
IGTO targets,Phase evolution,Activation energy,Densification behavior,Grain size,Resistivity
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