Visual Detection of Arbitrary Mode Shape of Optomechanical Resonant Sensor Based on Silicon Nitride Membrane
IEEE SENSORS JOURNAL（2025）
关键词
Sensors,Silicon,Shape,Thermomechanical processes,Visualization,Resonators,Resonant frequency,Resonance,Laser modes,Biomembranes,Displacement detection,interferometry,mode shape,optomechanical resonant sensor,silicon nitride
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