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3D Nano Hafnium‐Based Ferroelectric Memory Vertical Array for High‐Density and High‐Reliability Logic‐In‐Memory Application

Jiajie Yu,Tianyu Wang, Chen Lu,Zhenhai Li,Kangli Xu,Yongkai Liu, Yifan Song,Jialin Meng,Hao Zhu,Qingqing Sun,David Wei Zhang,Lin Chen

ADVANCED ELECTRONIC MATERIALS（2024）

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Key words
3D stacked memory array,computing-in-memory,hafnium-based ferroelectric memory,high density,high reliability
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