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Ring Cavity Surface-Emitting Quantum-Cascade Lasers with Staircase-like Distributed Feedback Grating

Nikita Yu. Kharin,Andrey V. Babichev,Dmitry A. Mikhailov,Evgenii S. Kolodeznyi,Vladislav V. Dudelev,Vadim Yu. Panevin, Gleb Voznyuk,Maksim Mitrofanov,Sergey O. Slipchenko,Andrey V. Lyutetskii, Vadim P. Evtikhiev,Leonid Ya. Karachinsky,Innokenty I. Novikov,Grigorii S. Sokolovskii,Nikita A. Pikhtin,Anton Yu. Egorov

2024 International Conference on Electrical Engineering and Photonics (EExPolytech)（2024）

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Key words
molecular-beam epitaxy,indium phosphide,quantum-cascade lasers,direct ion-beam lithography
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