Low‐temperature SOI SiGe/Si Superlattice FinFET with Omega‐shaped Channel and Self‐allied Silicide for 3D Sequential IC
ELECTRONICS LETTERS（2024）
Key words
integrated circuit manufacture,MOSFET,nanofabrication
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined