Multi-Domain Data Integration for Plasma Diagnostics in Semiconductor Manufacturing Using Tri-CycleGAN

Minji Kang,Sung Kyu Jang, Jihun Kim, Seongho Kim, Changmin Kim, Hyo-Chang Lee,Wooseok Kang,Min Sup Choi,Hyeongkeun Kim,Hyeong-U Kim

JOURNAL OF SENSOR AND ACTUATOR NETWORKS（2024）

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plasma diagnostics,reactive ion etching (RIE),semiconductor manufacturing,machine learning,cycle-consistent adversarial network (CycleGAN),multi-domain data integration

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