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Domain-Limiting Effect Modulation of Laser Debonding Threshold Based on Wafer Stacking Structure for Advanced Packaging

Wenxue Dai, Jieyuan Zhang,Fangcheng Wang,Qiang Liu,Mingqi Huang,Tao Wang,Guoping Zhang,Bingpu Zhou,Rong Sun

APPLIED SURFACE SCIENCE（2025）

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Key words
Laser debonding technology,Monolayer materials,Domain-limiting effect,Ablation threshold,Advanced packaging
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